PSM Semiconductor Packaging of Dual Frequency Vacuum Plasma System

PSM Plasma Systems is global leader plasma technology for Semiconductor, PCB, LCD and Material industries.

We PSM Inc. has rich experience and excellent staffs who have developed and commercialized various highly evaluated optimized processing techniques and practical manufacturing systems which are related to Semiconductor & Display industry, PCB & FCCL industry and other polymer industries o ver 10 years in the Institute for Advanced Engineering.  Semiconductor Packaging Technology

This is indeed useful technique that is able to improve productivity and quality simultaneously not only for semiconductor/displays/electronic parts, but for low-temperature material industry such as polymer & plastic / FPCB & FCCL by a possible in-line process.   We PSM Inc. are expanding and thriving based on the diverse world-leading essential patents of atmospheric pressure plasma techniques throughout the following four areas: semiconductor packaging/display dry cleaning/polymer materials, surface treatments /environmental system; furthermore, our technology has acquired a reputation in a wide range of areas.

PSM designed NPT-V04 to improve above issues by using Dual Power Supply

Dual Power Supply make minimized Collisional Ion Energy and Wire Short issue can be solved by minimized Collision Ion Energy.

Conventional Vacuum Plasma System has caused wire short and low uniformity failure. (using only RF Power Supply)

PSM designed NPT-V04 to improve above issues by using Dual Power Supply (RF: 13.56MHz, MF: 20~50KHz)

Dual Power Supply make minimized Collisional Ion Energy and Wire Short issue can be solved by        minimized Collisional Ion Energy.

Role of each Power Supply

·        RF (13.56MHz): Enhancing the plasma density and control it.

·        MF (20~50KHz): Lower the Ion and Electron energy

             - Minimized Damage and Charging Effect Vacuum Plasma Technique Korea

NPT-V04 is completely self-contained system and requires minimized space. Chamber, Control Part, RF and MF Power Supply are composed by single body. And each unit can be simply accessed. The unique shelves of NPT-V04(High Throughput Shelves) can guarantee higher reliability and quality. At the same time, it decreased process time. Magazines are placed vertically inside the vacuum chamber. Normally, each magazine holds around 20 lead frames. The chamber holds up to 12 magazines, it is depending on magazine size.

System features

·        Prevention for Wire Short Problem in High-density

·        Interconnect IC Package Sample

·        No Surface Damage (Possible control of ion)

·        Excellent Uniformity and Better Efficiency