High efficiency Atmospheric Pressure Plasma Cleaning Module | PSM
PSM Co., Ltd. is leading the plasma-application equipment and device market with its original proprietary atmospheric plasma technology. PSM’s atmospheric pressure plasma cleaning system technology is the new advanced plasma system that can overcome the limitations and drawbacks of the existing low-pressure vacuum plasma technique.
PSM’s overseas customers located in every country such as China, Japan, Taiwan, USA, and new customers are expanding into Southeast Asia and North American countries. low pressure plasma System korea
PSM M-Plasma series is a highly efficient atmospheric pressure Plasma module to be applicable to smart phone assemble process such as touch panel laminating and coating pre-treatment process. It can be used mainly for surface cleaning and surface refinement of glass, plastics, and the polymer surface. PSM M-Plasma series is especially effective in removing organic matter so that it may use to improve the adhesion when over-layer coating on the surface of glass and polymer.
Performance-proven applicable area of PSM M-Plasma series
ü TP module process: lamination
OCA/OCR Pre-coating, pre-treatment of Pol Film attachment
ü Pre-treatment for coating process on glass (AF, AR,
AS Coatings)
ü LCD Panel module bonding process
defect rate improvement
ü
Si/Glass Solar Cell substrate cleaning process
ü
Surface treatment of conductive substrates such as ITO Glass (No electrical damage)
Great features and merits of PSM M-Plasma series
ü It has a very good cleaning effect
and surface modification characteristics
(2-3 times higher cleaning effect
than the existing atmospheric pressure module)
ü Gap between sample and electrode
is larger than the existing electrode (~5 mm Max.)
ü Stable and safe use of electrode is possible
through the low operating voltage (~8kV) and low power (0.5~1.5kW).
ü It is applicable as roll-to-roll
equipment to CPI/UTG substrate surface cleaning and coating pretreatment
processes surface cleaning treatment system
product
General product specifications of PSM M-Plasma series
ü Treatment effect: Contact Angle:
<5° (Processing speed 100mm/s)
ü Electrode/Sample Gap: 3 mm
ü Process Gas Mixed gas use (N2 +
CDA)
ü Low operating voltage: 6kV ~ 8kV
ü No use of cooling water (process
gas is cooled Electrode structure that also provides effects)
ü Gas interlock system installation
ü Exhaust: ~400 Pa

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