PSM Surface treatment System for flat panel display using Atmospheric pressure plasma LCD Application
PSM Plasma Systems is global leader plasma technology for
Semiconductor, PCB, LCD and Material industries.
We PSM Inc. has rich experience and excellent staffs who
have developed and commercialized various highly evaluated optimized processing
techniques and practical manufacturing systems which are related to
Semiconductor & Display industry, PCB & FCCL industry and other polymer
industries over 10 years in the Institute for Advanced Engineering.
LCD Applications:
NPT 303-S
The surface cleaning and treatment system using atmospheric
pressure plasma (APP) is widely expanded in various display manufacturing process
like TFT-LCD, PDP, OLED, solar cell as a new alternative of EUV system.
PSM APP system can support excellent cost effective
processing as well as its convenient installation and operation with
conventional wet cleaning system. Atmospheric Pressure Plasma
Cleaning System
Basically it also assists to raise up performance and
production yield by removing surface organic contaminations and improving
surface wetting & adhesion property.
The surface cleaning mechanism of APP is mainly based on
chemical reaction between substrate surface and very reactive neutral radicals
which is generated by N2+Air glow discharge.
The major difference with vacuum plasma system is on the
electrical safety which means perfectly free from pattern damage,
It can be achieved with the unique electrode design trapping
and filtering charged species like electrons or ions. This ESD free
characteristic of PSM APP was verified by many TFT-LCD manufacturers for several
years.
Furthermore, we can suggest upto 9th generation (w >2550)
without mechanical/thermal stability issue Some
of advancing TFT-LCD company
having world largest glass of 8 generation make use of PSM APP since
very big size APP was developed last year
If you have chance to utilize PSM APP in FPD field, you must
add to your best experience in a view points of higher performance, cost
effectiveness and simple maintenance etc. plasma surface treatment
equipment korea
Major Applications:
Cleaning and Surface Activation of Large Area FPD Glass
Surface modification of Large Area LCD, OLED Glass and
Patterned Glass Panel
Specifications:
·
Plasma Type: Plasma Spray
·
Dimension: 2,358(W) × 168(D) × 107(H) for 8G
·
Effective Plasma Zone: max. 2500mm
·
Power Generator: 20~100kHz/8~16kW
(Frequency/Power)
·
Process Gas: N2, Air Electricity: AC 220V, 60Hz,
3phase
·
High Process Efficiency (Contact Angle)
-
LCD Bare Glass : <5 ° (at 60mm/sec)
-
LCD RGB Color Filter : <25 ° (at
60mm/sec)

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